1. Microgripper technique was one of important parts in micromachine techniques.

2. Planar windings manufactured by LIGA technology and silicon micromachine technology are connected with three-phase wye connection.

3. The CAD technology in micromachine rapid prototyping system is presented. The design of the slicing software for micromachine rapid prototyping system is discussed in detail.

4. A special technology for making new hybrid silicon micromachine and optic fiber array sensor is systematically presented in the paper.

5. A process for fabricating a micromachine in which removal of a sacrifice layer and sealing can be carried out without requiring any special packaging technology.

6. Some new techniques are adopted, for example, technology of dual-face alignmental silicon etching and anisotropic corrosion (micromachine), etc.

7. The soap salt and phosphazene compound lubricating film with nanometer thickness is expected to be applied in an air bearing, an electric touch switch, a micromachine and other devices.

8. In recent years, the demand is growing for the milling tools for ultra-precision three-dimensional microprocessing in the micromachine and biomedical fields.

9. Genetic algorithm is applied to optimize designing structure of micromachine properties tester.

10. A new type of zine oxide(ZnO)thin film devices can be realized utilizing piezoelectric and surface micromachine technology.

11. It states that because of the inevitable tend for the industrialization of micromachine, it is both necessary and feasible for China to develop the industry of micromachine.

12. The detail of the production is described. The experiment results show that the micromachine sound sensor with the integral structure is one with high Q-factor, hi...